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Поиск книг, содержащих: Bias sputtering
| Книга | Страницы для поиска | | Rossnagel S.M., Cuomo J.J., Westwood W.D. — Handbook of plasma processing technology. Fundamentals, etching, deposition, and surface interaction | 409, 489 | | Campbell S.A. — The Science and Engineering of Microelectronic Fabrication | 315—316 | | Plummer J.D., Deal M.D., Griffin P.B. — Silicon VLSI Technology: Fundamentals, Practice, and Modeling | 549—551 |
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