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Cleland A.N. — Foundations of nanomechanics
Cleland A.N. — Foundations of nanomechanics

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Название: Foundations of nanomechanics

Автор: Cleland A.N.

Аннотация:

This text provides an introduction, at the level of an advanced student in engineering or physics, to the field of nanomechanics and nanomechanical devices. It provides a unified discussion of solid mechanics, transducer applications, and sources of noise and nonlinearity in such devices. Demonstrated applications of these devices, as well as an introduction to fabrication techniques, are also discussed. The text concludes with an overview of future technologies, including the potential use of carbon nanotubes and other molecular assemblies.


Язык: en

Рубрика: Физика/Физика твёрдого тела/Приложения/

Статус предметного указателя: Готов указатель с номерами страниц

ed2k: ed2k stats

Год издания: 2002

Количество страниц: 430

Добавлена в каталог: 15.08.2005

Операции: Положить на полку | Скопировать ссылку для форума | Скопировать ID
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Предметный указатель
$sp^2$ orbital      23
$sp^3$ orbital      24
$\mathrm{C}_{60}$      336
$\sigma$ function      414
$\textrm{CO}_2$ drying      405
Acoustic band      28
Acoustic modes      26
Affine deformation      173
AFM lithography      361
Airy function      216
Akhiezer effect      117
Allan variance      300 317
Aluminum etchant      378
Aluminum nitride      185 310
Amplitude noise      295
Anelastic      175
Angular frequency      243
Annihilation operator      38
APCVD      383
Aqua regia      378
Atom chain      1
Atomic force microscope      343
Attenuation, Pippard      290
Basis      43
Beam bending formula      207
Beam blanker      356
Beam flexure      198
Beam, extension      195
Beams      194
Beltrami — Michell compatibility equations      418
Bending angle $\theta$      204
Bending, pure      150
Bernoulli, J.      203
BHF      377
Biharmonic operator, two-dimensional      216
Biharmouic equation      217
Binding energy      3
Bloch form      55
Bloch's theorem      15 54
Body forces      168
Body forces, time-dependent      246
Body-centered cubic lattice, three dimensional      47
Boe      378
Bohr magneton      340
Boltzmann transport equation      133
Bonssincsq, J.      220
Born — Oppenheimer      119
Bosch process      403
Bose — Einstein distribution      32 33 1
Bravais lattice      44
Bravais lattice, three dimensional      46
Brittle      177
Buffered hydrofluoric acid      377
Buffered oxide etch      378
bulk modulus      116
CAIBE      397
Calixarene      359
cantilever      236
Casimir limit      137
Center of mass      6
Centroid      194 203
Chain of atoms      1
Characteristic equation      11
chemical potential      122 140
chemical vapor deposition      382
Chemically assisted ion beam etching      370
Christoffel tensor      249
Chromium etchant      378
Circular magnetron      381
Coefficient of thermal expansion      117
Commutation, quantum mechanical      37
Compatibility relations      417
Contact lithography      351
Critical angle      259
Critical point drying      405
Crystalline materials      184
Crystallographies silicon etches      375
Crystals      43
CVD      382
Cylinder, circular      211
D'Alembert solution      225
Debye peak      285
Debye temperature      03
Deep level donors      386
Deformation potential, scalar      120
Delia function      414
Delta function, Kronecker      39
Density of states      34
Density of states, three dimensions      89
Destruction operator      38
diamond      184
Diamond structure      48
Diffusion, limited source      388
Diffusion, unlimited source      388
Diffusivity      387
Dilatation      116 193 242
Dilatation, phonons      120
Dilatation, two-dimensional      210
Dilatational wave      257
Dilatational waves      243
Dimer      1
Dirac $\delta$-function      414
Direction cosines      409
Dirichlet boundary conditions      194
dispersion relation      19
Dispersive medium      20
Dissipation D      281
Dissipative constant $\gamma$      279
Doping      386
Doping, diffusion      387
Doubly-clamped beam      235
Doubly-clamped beam, nonlinear      312
dry etching      364
Drying, critical point      405
Ductile      176
Duffing equation      314 315
Dulong — Petit      31
Dulong — Petit law      88
Dyadic tensor      147
Dynamical matrix      65
ECR etching      366
EDP      377
Eigenvalue      413
Eigenvalue-eigenvector equation      11
Eigenvector      413
Elastic      175
Elastic compliance      187
Elastic linear      176
Elastic nonlinear      176
Elastic stiffness      179
Electric displacement D      128
Electrometer, mechanical      331
Electron beam lithography      355
Electron spin resonance      342
Electron-phonon scattering      119
Electrostatic actuation      321 326
End-point detection      372
Energy density, strained solid      83
Energy, kinetic      6
Energy, potential      2
Ethylenediamine pyrocatechol      377
Euler — Bernoulli theory      202 203
Euler, L.      203
Extensional forces      194
Face-centered cubic lattice, three dimensional      47
Fermi distribution      122
Fermi energy      122 140
Fermi velocity      140
Fermi wavevector      140
Fermi — Dirac distribution      140
Fermi's golden rule      105
Fermion      140
Fick's law      387
Film thickness monitor      382
First Brillouin zone      52
Fixed boundary conditions      21
Flexural vibrations      233
Flexure of beams      198
Fluctuation-dissipation theorem      277
Fluctuations, frequency      317
Focussed ion beams      360
Force noise      345
Force, extensional      194
Force, point      210
Fourier series      50
Fourier transform      50 248
Fracture point      177
Free-free beam      319
Free-free resonator      319
Frequency fluctuations      299 317
Fullerene      336
GaAs, ion beam etching      371
GaAs, reactive ion etching      369
Gallium arsenide      184
Gallium nitride      185
Generating vectors      43
Germanium      184
Gold etchant      378
Green's function      219
Group velocity      20 101 251
Gruneitsen's constant      116
Hamilton's equations of motion      7
Hamiltonian      7
Handle      303
Harmonic approximation      58
harmonic oscillator      7
Harmonic potential, approximation      5
heat capacity      33
heterostructure      303 350
Hexagonal close-packed lattice      48
Hexagonal lattice, two-dimensional      44
HF      377
Hooke's law      175
Hooke, Robert      175
Hybridize      23
Hydrofluoric acid      377
Hydrostatic stress      174
Imprint lithography      362
Indium arsenide      184
Interaction potential      8
Inverse approach      195
Inverse Fourier transform      51 248
Inversion symmetry      180
ion implantation      390
Ion milling      370
Isotope scattering      104
Isotropic solid      178
Kernel      134
Ket      37
kinetic energy      6
Kronecker delta function      39
Lame constants      181 187 189 191 192
Lame, G.      181
Landau — Rumer effect      114
Langevin equation      278
Langevin equations      279
Larmor frequency      341
Lateral inertia effects      232
Lattice, classical theory of      56
Lattice, crystal      43
Lattice, two-dimensional      44
Lennard-Jones potential      2
Lift-off      380
Linear response      177
Logarithmic decrement      282
Longitudinal mode      67
Longitudinal plane waves      246
Longitudinal vibration      224
Longitudinal wave velocity      243
Lorenz number      141
Low temperature oxide      377
Low-pressure chemical vapor deposition      382
Lowering operator      38
LPGVD      382
LTO      377
Magnetic resonance force microscopy      340
Magnetic resonance imaging      341
Magnetoacoustic effect      291
Magnetomotive displacement      305
Mask aligner      351
Mass, reduced      7
Mathieu equation      324
Mathieu oscillator      321 324
Matrix element, scattering      105
Metal film etching      378
Metals, thermal conductivity      140
Metastable      4
Mode conversion      257 259
Molecule      1
Monoclinic crystal      82
n-process      111
Nanomachining, epitaxial heterostructures      399
Nanomachining, single crystal      395
Nanomechanics      1
Nanoscratching      362
Navier equations      215
Navier equations, three-dimensional      193
Negative photoresist      353
Negative resist      304
Neumann boundary conditions      194
Neutral axis      199 201 203
Noise, amplitude      295
Noise, force      345
Noise, frequency      299
Noise, phase      296
Nonlinear resonators      312
Normal modes      11
Normal modes, beams      223
Normal scattering process      103 111
Number operator      38
Occupation number      29
Occupation numbers      78
Operators, quantum      77
Optical band      28
Optical branch      75
Optical modes      26
Optical phonons      75
Orthotropic      181
Oscillator, harmonic      7
P(MMA-MAA)      358
P-waves      245
Parametric amplifier      327
Parametric amplifier, torsional      328
Parametric modulation      324
Parametric resonator      321
PECVD      383
Periodic, boundary conditions      14 2
Permittivity, vacuum      128
Perturbation, second-order      115
Phase noise      296 317
Phase space volume      31
phase velocity      20 101 225
Phase-locked loop      317
Phonon energy      102
Phonon focusing      252
Phonon momentum      102
Phonon-phonon interactions      288
Phonon-phonon scattering      109
Phonons      43 77
Phosphoric acid      378
1 2
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