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| Авторизация |
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| Cleland A.N. — Foundations of nanomechanics |
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| Предметный указатель |
 orbital 23
 orbital 24
 336
 function 414
 drying 405
Acoustic band 28
Acoustic modes 26
Affine deformation 173
AFM lithography 361
Airy function 216
Akhiezer effect 117
Allan variance 300 317
Aluminum etchant 378
Aluminum nitride 185 310
Amplitude noise 295
Anelastic 175
Angular frequency 243
Annihilation operator 38
APCVD 383
Aqua regia 378
Atom chain 1
Atomic force microscope 343
Attenuation, Pippard 290
Basis 43
Beam bending formula 207
Beam blanker 356
Beam flexure 198
Beam, extension 195
Beams 194
Beltrami — Michell compatibility equations 418
Bending angle  204
Bending, pure 150
Bernoulli, J. 203
BHF 377
Biharmonic operator, two-dimensional 216
Biharmouic equation 217
Binding energy 3
Bloch form 55
Bloch's theorem 15 54
Body forces 168
Body forces, time-dependent 246
Body-centered cubic lattice, three dimensional 47
Boe 378
Bohr magneton 340
Boltzmann transport equation 133
Bonssincsq, J. 220
Born — Oppenheimer 119
Bosch process 403
Bose — Einstein distribution 32 33 1
Bravais lattice 44
Bravais lattice, three dimensional 46
Brittle 177
Buffered hydrofluoric acid 377
Buffered oxide etch 378
bulk modulus 116
CAIBE 397
Calixarene 359
cantilever 236
Casimir limit 137
Center of mass 6
Centroid 194 203
Chain of atoms 1
Characteristic equation 11
chemical potential 122 140
chemical vapor deposition 382
Chemically assisted ion beam etching 370
Christoffel tensor 249
Chromium etchant 378
Circular magnetron 381
Coefficient of thermal expansion 117
Commutation, quantum mechanical 37
Compatibility relations 417
Contact lithography 351
Critical angle 259
Critical point drying 405
Crystalline materials 184
Crystallographies silicon etches 375
Crystals 43
CVD 382
Cylinder, circular 211
D'Alembert solution 225
Debye peak 285
Debye temperature 03
Deep level donors 386
Deformation potential, scalar 120
Delia function 414
Delta function, Kronecker 39
Density of states 34
Density of states, three dimensions 89
Destruction operator 38
diamond 184
Diamond structure 48
Diffusion, limited source 388
Diffusion, unlimited source 388
Diffusivity 387
Dilatation 116 193 242
Dilatation, phonons 120
Dilatation, two-dimensional 210
Dilatational wave 257
Dilatational waves 243
Dimer 1
Dirac  -function 414
Direction cosines 409
Dirichlet boundary conditions 194
dispersion relation 19
Dispersive medium 20
Dissipation D 281
Dissipative constant  279
Doping 386
Doping, diffusion 387
Doubly-clamped beam 235
Doubly-clamped beam, nonlinear 312
dry etching 364
Drying, critical point 405
Ductile 176
Duffing equation 314 315
Dulong — Petit 31
Dulong — Petit law 88
Dyadic tensor 147
Dynamical matrix 65
ECR etching 366
EDP 377
Eigenvalue 413
Eigenvalue-eigenvector equation 11
Eigenvector 413
Elastic 175
Elastic compliance 187
Elastic linear 176
Elastic nonlinear 176
Elastic stiffness 179
Electric displacement D 128
Electrometer, mechanical 331
Electron beam lithography 355
Electron spin resonance 342
Electron-phonon scattering 119
Electrostatic actuation 321 326
End-point detection 372
Energy density, strained solid 83
Energy, kinetic 6
Energy, potential 2
Ethylenediamine pyrocatechol 377
Euler — Bernoulli theory 202 203
Euler, L. 203
Extensional forces 194
Face-centered cubic lattice, three dimensional 47
Fermi distribution 122
Fermi energy 122 140
Fermi velocity 140
Fermi wavevector 140
Fermi — Dirac distribution 140
| Fermi's golden rule 105
Fermion 140
Fick's law 387
Film thickness monitor 382
First Brillouin zone 52
Fixed boundary conditions 21
Flexural vibrations 233
Flexure of beams 198
Fluctuation-dissipation theorem 277
Fluctuations, frequency 317
Focussed ion beams 360
Force noise 345
Force, extensional 194
Force, point 210
Fourier series 50
Fourier transform 50 248
Fracture point 177
Free-free beam 319
Free-free resonator 319
Frequency fluctuations 299 317
Fullerene 336
GaAs, ion beam etching 371
GaAs, reactive ion etching 369
Gallium arsenide 184
Gallium nitride 185
Generating vectors 43
Germanium 184
Gold etchant 378
Green's function 219
Group velocity 20 101 251
Gruneitsen's constant 116
Hamilton's equations of motion 7
Hamiltonian 7
Handle 303
Harmonic approximation 58
harmonic oscillator 7
Harmonic potential, approximation 5
heat capacity 33
heterostructure 303 350
Hexagonal close-packed lattice 48
Hexagonal lattice, two-dimensional 44
HF 377
Hooke's law 175
Hooke, Robert 175
Hybridize 23
Hydrofluoric acid 377
Hydrostatic stress 174
Imprint lithography 362
Indium arsenide 184
Interaction potential 8
Inverse approach 195
Inverse Fourier transform 51 248
Inversion symmetry 180
ion implantation 390
Ion milling 370
Isotope scattering 104
Isotropic solid 178
Kernel 134
Ket 37
kinetic energy 6
Kronecker delta function 39
Lame constants 181 187 189 191 192
Lame, G. 181
Landau — Rumer effect 114
Langevin equation 278
Langevin equations 279
Larmor frequency 341
Lateral inertia effects 232
Lattice, classical theory of 56
Lattice, crystal 43
Lattice, two-dimensional 44
Lennard-Jones potential 2
Lift-off 380
Linear response 177
Logarithmic decrement 282
Longitudinal mode 67
Longitudinal plane waves 246
Longitudinal vibration 224
Longitudinal wave velocity 243
Lorenz number 141
Low temperature oxide 377
Low-pressure chemical vapor deposition 382
Lowering operator 38
LPGVD 382
LTO 377
Magnetic resonance force microscopy 340
Magnetic resonance imaging 341
Magnetoacoustic effect 291
Magnetomotive displacement 305
Mask aligner 351
Mass, reduced 7
Mathieu equation 324
Mathieu oscillator 321 324
Matrix element, scattering 105
Metal film etching 378
Metals, thermal conductivity 140
Metastable 4
Mode conversion 257 259
Molecule 1
Monoclinic crystal 82
n-process 111
Nanomachining, epitaxial heterostructures 399
Nanomachining, single crystal 395
Nanomechanics 1
Nanoscratching 362
Navier equations 215
Navier equations, three-dimensional 193
Negative photoresist 353
Negative resist 304
Neumann boundary conditions 194
Neutral axis 199 201 203
Noise, amplitude 295
Noise, force 345
Noise, frequency 299
Noise, phase 296
Nonlinear resonators 312
Normal modes 11
Normal modes, beams 223
Normal scattering process 103 111
Number operator 38
Occupation number 29
Occupation numbers 78
Operators, quantum 77
Optical band 28
Optical branch 75
Optical modes 26
Optical phonons 75
Orthotropic 181
Oscillator, harmonic 7
P(MMA-MAA) 358
P-waves 245
Parametric amplifier 327
Parametric amplifier, torsional 328
Parametric modulation 324
Parametric resonator 321
PECVD 383
Periodic, boundary conditions 14 2
Permittivity, vacuum 128
Perturbation, second-order 115
Phase noise 296 317
Phase space volume 31
phase velocity 20 101 225
Phase-locked loop 317
Phonon energy 102
Phonon focusing 252
Phonon momentum 102
Phonon-phonon interactions 288
Phonon-phonon scattering 109
Phonons 43 77
Phosphoric acid 378
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