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| Авторизация |
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| Поиск по указателям |
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| Cleland A.N. — Foundations of nanomechanics |
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| Предметный указатель |
Phosphosilicate glass 377
photolithography 351
Photomask 351
photoresist 351
Photoresist, etch mask 353
Photoresist, liftoff mask 353
Piezoelectric stress constant 129
Piezoelectricity 127
piezoresistance 126
Pippard attenuation 290
Planar magnetron 381
Planck's constant, h 30
Plane strain 215
Plane stress 167 215 217
Plane waves 242
Plasma etching 364
Plasma-enhanced CVD 383
Plastic deformation 1
Platinum etchant 378
PMMA 357
PMMA copolymer 358
PMMA cross-linking 358
PMMA developer 358
Pochhammer waves 271
Point forces 210
Poisson ratio 192
Poisson's ratio 187 191
Polar moment of inertia 204
Polar moment, cylinder 204
Polar moment, rectangle 204
Polarization, normal mode 65
Polishing etch 374
Polycrystalline materials 188 402
Polymethylmethacrylate 357
Polysilicon 320 350
Polysilicon deposition 386
Positive photoresist 353
Positive resist 304
potential energy 2
Poynting vector 251
Primary waves 245
Primitive unit cell 44
Principal axes 413
Principal axes, strain 153
Principal value 413
Projection lithography 351
proximity effect 357
psg 377
Quality factor Q 281
Quant mil of thermal conductance 137 334
Quantum number 29
Quantum operators 77
Radius of curvature, local 204
Raising operator 38
Rayleigh wave velocity 262
Rayleigh waves 256 262
Rayleigh — Lamb equation 263
Rayleigh — Lamb equation for the plate 267 271
Reactive ion beam etching 370
Reactive ion etching 365
Reciprocal lattice 50 51
Reciprocal space 50
Reduced mass 7
Relative displacement 147
Relaxation time approximation 135
Resonance frequency 7
Resonator, torsional 326 331
Resonators, nonlinear 312
Resonators, radiofrequency 305
rf magnetron 365
RIE, GaAs and GaAlAs 369
RIE, masking 369
RIE, metals 369
RIE, silicon 367
Rotation tensor 81 148 408
s-waves 246
Saint-Venant'a principle 202
SAMs 363
scalar 407
Scalar potential 244
Scanned probe lithography 362
Scanning tunneling microscope 343
Scattering, phonon-phonon 109
SCREAM process 305 396
Second-order perturbation 115
Secondary waves 246
Secular equation 413
self-assembled monolayers 363
Shallow level donors 386
Shear 208
Shear force 158
Shear horizontal 261
Shear horizontal wave 257
shear modulus 187
Shear stress 158
Shear vertical wave 257
Shear, pure 149
Silicate etchants 377
Silicon 184
Silicon carbide 184 309
Silicon dioxide 377
| Silicon dry etching 367
Silicon nitride deposition 385
Silicon nitride film, suspended 402
Silicon nitride, etching 378
Silicon oxide deposition 384
Silicon regrowth 390
Silicon wet etching 375
Silver etchant 379
SIMOX 332 399
Simple cubic lattice, three dimensional 47
Simple cubic lattice, two-dimensional 44
Simple harmonic oscillator 7
Six-vector form 178
Slice 399
Solid, dynamical equations 240
Specific heat 33
Spectral density 279
Sputter deposition 381
standing waves 17 21
Step-and-repeat 351
Stiffness matrix 84
STM lithography 361 362
strain 10
Strain hardening 176
Strain tensor 81 148 151
Strain tensor, Eulerian 157
Strain, Eulerian 156
Strain, six-vector form 82 178
Strain, superposition 155
Strain-displacement relation 191
Stress tensor 83 160
Stress tensor, transformations 162
Stress, arbitrary surface 164
Stress, boundary conditions 192
Stress, inhomogeneous 167
Stress, principal axes 165
Stress, six-vector form 83 178
Stress, tensile 157
Stress-body force relation 191
Stress-strain relation 187
Stress-strain relation, linear 192
Surface normal, outward 161
Surface waves 256
Taylor cone 360
Taylor series expansion 4
Tensor 408
Tetramethyl ammonium hydroxide 377
Thermal conductance 131 334
Thermal conductance, quantized 137
thermal conductivity 133
Thermal conductivity, insulators 131
Thermal conductivity, metals 140
Thermal evaporation 379
Thermoelastic relaxation 285
Titanium etchant 378
Titin 177
TMAH 377
Torsion 211 214
Torsion, dynamic 229
Torsional resonator 326 331
Torsional rigidity 214
Translation vector 408
Transverse plane wave 246
Transverse wave 244
Triclinic class 82
Trimer 8
Tungsten etchant 379
Tunnel junction fabrication 391
Two-atom chain 1
Two-level system 284
Two-particle interaction 9
U-process 111
Umklapp scattering 103 121
Umklapp scattering process 111
Unit cell 44
Van der Waals force 2
Van Hove singularities 93
Vector 408
Vector potential 244
Vector stress 160
Wave equation, one-dimensional 22
Wave packet 101
wave velocity 19
Waves, in rods 271
Waves, infinite crystal 249
Waves, infinite solid 242
Waves, normal incidence to surface 256
Waves, oblique incidence to surface 257
Waves, plate 264
Waves, semi-infinite solid 254
Wavevector 225 243
Wet etching 373
Whole-wafer lithography 351
Wiedemann — Franz law 141
Wigner — Seitz cell 44
Wurtzite 49 185
Young's modulus 187 191 192
Zener model for dissipation 282
Zero-point energy 30
Zinc oxide 185
Zincblende 49 185
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