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Cleland A.N. — Foundations of nanomechanics
Cleland A.N. — Foundations of nanomechanics



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Название: Foundations of nanomechanics

Автор: Cleland A.N.

Аннотация:

This text provides an introduction, at the level of an advanced student in engineering or physics, to the field of nanomechanics and nanomechanical devices. It provides a unified discussion of solid mechanics, transducer applications, and sources of noise and nonlinearity in such devices. Demonstrated applications of these devices, as well as an introduction to fabrication techniques, are also discussed. The text concludes with an overview of future technologies, including the potential use of carbon nanotubes and other molecular assemblies.


Язык: en

Рубрика: Физика/Физика твёрдого тела/Приложения/

Статус предметного указателя: Готов указатель с номерами страниц

ed2k: ed2k stats

Год издания: 2002

Количество страниц: 430

Добавлена в каталог: 15.08.2005

Операции: Положить на полку | Скопировать ссылку для форума | Скопировать ID
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Предметный указатель
Phosphosilicate glass      377
photolithography      351
Photomask      351
photoresist      351
Photoresist, etch mask      353
Photoresist, liftoff mask      353
Piezoelectric stress constant      129
Piezoelectricity      127
piezoresistance      126
Pippard attenuation      290
Planar magnetron      381
Planck's constant, h      30
Plane strain      215
Plane stress      167 215 217
Plane waves      242
Plasma etching      364
Plasma-enhanced CVD      383
Plastic deformation      1
Platinum etchant      378
PMMA      357
PMMA copolymer      358
PMMA cross-linking      358
PMMA developer      358
Pochhammer waves      271
Point forces      210
Poisson ratio      192
Poisson's ratio      187 191
Polar moment of inertia      204
Polar moment, cylinder      204
Polar moment, rectangle      204
Polarization, normal mode      65
Polishing etch      374
Polycrystalline materials      188 402
Polymethylmethacrylate      357
Polysilicon      320 350
Polysilicon deposition      386
Positive photoresist      353
Positive resist      304
potential energy      2
Poynting vector      251
Primary waves      245
Primitive unit cell      44
Principal axes      413
Principal axes, strain      153
Principal value      413
Projection lithography      351
proximity effect      357
psg      377
Quality factor Q      281
Quant mil of thermal conductance      137 334
Quantum number      29
Quantum operators      77
Radius of curvature, local      204
Raising operator      38
Rayleigh wave velocity      262
Rayleigh waves      256 262
Rayleigh — Lamb equation      263
Rayleigh — Lamb equation for the plate      267 271
Reactive ion beam etching      370
Reactive ion etching      365
Reciprocal lattice      50 51
Reciprocal space      50
Reduced mass      7
Relative displacement      147
Relaxation time approximation      135
Resonance frequency      7
Resonator, torsional      326 331
Resonators, nonlinear      312
Resonators, radiofrequency      305
rf magnetron      365
RIE, GaAs and GaAlAs      369
RIE, masking      369
RIE, metals      369
RIE, silicon      367
Rotation tensor      81 148 408
s-waves      246
Saint-Venant'a principle      202
SAMs      363
scalar      407
Scalar potential      244
Scanned probe lithography      362
Scanning tunneling microscope      343
Scattering, phonon-phonon      109
SCREAM process      305 396
Second-order perturbation      115
Secondary waves      246
Secular equation      413
self-assembled monolayers      363
Shallow level donors      386
Shear      208
Shear force      158
Shear horizontal      261
Shear horizontal wave      257
shear modulus      187
Shear stress      158
Shear vertical wave      257
Shear, pure      149
Silicate etchants      377
Silicon      184
Silicon carbide      184 309
Silicon dioxide      377
Silicon dry etching      367
Silicon nitride deposition      385
Silicon nitride film, suspended      402
Silicon nitride, etching      378
Silicon oxide deposition      384
Silicon regrowth      390
Silicon wet etching      375
Silver etchant      379
SIMOX      332 399
Simple cubic lattice, three dimensional      47
Simple cubic lattice, two-dimensional      44
Simple harmonic oscillator      7
Six-vector form      178
Slice      399
Solid, dynamical equations      240
Specific heat      33
Spectral density      279
Sputter deposition      381
standing waves      17 21
Step-and-repeat      351
Stiffness matrix      84
STM lithography      361 362
strain      10
Strain hardening      176
Strain tensor      81 148 151
Strain tensor, Eulerian      157
Strain, Eulerian      156
Strain, six-vector form      82 178
Strain, superposition      155
Strain-displacement relation      191
Stress tensor      83 160
Stress tensor, transformations      162
Stress, arbitrary surface      164
Stress, boundary conditions      192
Stress, inhomogeneous      167
Stress, principal axes      165
Stress, six-vector form      83 178
Stress, tensile      157
Stress-body force relation      191
Stress-strain relation      187
Stress-strain relation, linear      192
Surface normal, outward      161
Surface waves      256
Taylor cone      360
Taylor series expansion      4
Tensor      408
Tetramethyl ammonium hydroxide      377
Thermal conductance      131 334
Thermal conductance, quantized      137
thermal conductivity      133
Thermal conductivity, insulators      131
Thermal conductivity, metals      140
Thermal evaporation      379
Thermoelastic relaxation      285
Titanium etchant      378
Titin      177
TMAH      377
Torsion      211 214
Torsion, dynamic      229
Torsional resonator      326 331
Torsional rigidity      214
Translation vector      408
Transverse plane wave      246
Transverse wave      244
Triclinic class      82
Trimer      8
Tungsten etchant      379
Tunnel junction fabrication      391
Two-atom chain      1
Two-level system      284
Two-particle interaction      9
U-process      111
Umklapp scattering      103 121
Umklapp scattering process      111
Unit cell      44
Van der Waals force      2
Van Hove singularities      93
Vector      408
Vector potential      244
Vector stress      160
Wave equation, one-dimensional      22
Wave packet      101
wave velocity      19
Waves, in rods      271
Waves, infinite crystal      249
Waves, infinite solid      242
Waves, normal incidence to surface      256
Waves, oblique incidence to surface      257
Waves, plate      264
Waves, semi-infinite solid      254
Wavevector      225 243
Wet etching      373
Whole-wafer lithography      351
Wiedemann — Franz law      141
Wigner — Seitz cell      44
Wurtzite      49 185
Young's modulus      187 191 192
Zener model for dissipation      282
Zero-point energy      30
Zinc oxide      185
Zincblende      49 185
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