An introduction to microelectronic fabrication — Semiconductor substrates — Diffusion — Thermal oxidation — Ion implantation — Rapid thermal processing — Optical lithography — Photoresists — Nonoptical lithographic techniques — Vacuum science and plasmas — Etching — Physical deposition: evaporation and sputtering — Chemical vapor deposition — Epitaxial growth — Device isolation, contacts, and metallization — CMOS technologies — GaAs technologies — Silicon bipolar technologies — MEMS — Integrated circuit manufacturing — Appendix 1. Acronyms and common symbols — Appendix 2. Properties of selected semiconductor materials — Appendix 3. Physical constants — Appendix 4. Conversion factors — Appendix 5. Some properties of the error function — Appendix 6. F values — Appendix 7. SUPREM commands