The aim of this book is to provide a practical guide on the fundamentals, status of present technology and applications of excimer lasers. Theoretical details have been intentionally omitted. The book has emerged from “Excimer laser technology: Laser sources, optics, systems and applications” issued earlier by a manufacturer of excimer lasers. The scope of the book has been considerably enlarged and the knowledge deepened by the participation of several renowned international researchers. Thus, it may form not only the basis for training programs for service and maintenance personnel on excimer
lasers, but serves also to address researchers, technologists and newcomers in the field of UV lasers and applications who require a thorough introduction to the field.