This text provides a description of the large range of techniques currently in use for the characterization of the microstructure of materials. The authors explain the interactions between various radiations of materials, and show how these interactions form the basis of specific evaluation and measurement methods. Sections of the book deal with basic science and technology, such as diffraction laws and vacuum techniques. The characterization techniques are divided on the basis of the interrogation radiation source. Computer applications in instrument control, data acquisition and analysis are discussed, together with simulation techniques.