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Название: Frontiers of Thin Film Technology. (Volume 28)
Авторы: Francombe M.H., Rossnagel S.M., Ulman A.
Аннотация:
Frontiers of Thin Film Technology, Volume 28 focuses on recent developments in those technologies that are critical to the successful growth, fabrication, and characterization of newly emerging solid-state thin film device architectures.
Volume 28 is a condensed sampler of the Handbook for use by professional scientists, engineers, and students involved in the materials, design, fabrication, diagnostics, and measurement aspects of these important new devices.