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Название: Semiconductor Industry: Wafer Fab Exhaust Management
Автор: Sherer J.M.
Now a consultant, Sherer draws on his long background in chemical, environmental, and safety engineering to offer ideas and solutions to engineering questions about wafer fabrication exhaust management, which he says can encompass exhaust systems, point-of-use devices, and centralized abatement equipment. He uses the terms wafer fab(rication) and semiconductor manufacturing interchangeably. Among his topics are the semiconductor manufacturing facility, exhaust types and challenges, point-of-use devices close to the process equipment and their required exhaust lines, centralized wet scrubbers for a centralized acid exhaust system and a centralized ammonia exhaust system, centralized equipment to control volatile organic compounds, and emergency releases.