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Название: Dielectric Films for Advanced Microelectronics
Авторы: Baklanov M. (ed.), Green M. (ed.), Maex K. (ed.)
Аннотация:
The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials.