Written by the man often regarded as the "Father of Digital Metrology," the Handbook of Surface and Nanometrology is an updated and expanded version of the most definitive work in this field, the Handbook of Surface Metrology. It covers in great detail surface metrology and nanometrology and more importantly, the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. The author explains trends and mechanisms in detail with numerous practical examples. Many aspects of nanotechnology and precision engineering are considered in chapters on manufacture, characterization, standardization, performance, and instrumentation.