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Название: Deposition and Materials
Автор: Hari Singh Nalwa
Thin film materials are the key elements of continued technological advances made in the fields of electronic, photonic, and magnetic devices. The processing of materials into thin- films allows easy integration into various types of devices. The thin film materials discussed in this handbook include semiconductors, superconductors, ferroelectrics, nanostructured ma- terials, magnetic materials, etc. Thin film materials have already been used in semiconductor devices, wireless communication, telecommunications, integrated circuits, solar cells, light- emitting diodes, liquid crystal displays, magneto-optic memories, audio and video systems, compact discs, electro-optic coatings, memories, multilayer capacitors, fiat-panel displays, smart windows, computer chips, magneto-optic disks, lithography, microelectromechanical systems (MEMS) and multifunctional protective coatings, as well as other emerging cutting edge technologies. The vast variety of thin film materials, their deposition, processing and fab- rication techniques, spectroscopic characterization, optical characterization probes, physical properties, and structure-property relationships compiled in this handbook are the key features of such devices and basis of thin film technology.