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Название: Copper Interconnect Technology
Автор: T. Gupta
Аннотация:
Thefrontiersofknowledgeareadvancingatanever-increasingrate.Today’sdiscoveries will tomorrow be part of the toolbox of every researcher. By analogy, the processofadvancingthelineofsettlements,andcultivatingandcivilizingnewterritory, takes place in stages, and the semiconductor industry, which has brought a revolution in modern civilization, is a vivid example. The intellectual foment that marked its beginnings has changed the way we view the physical world forever. Since the creation of the integrated circuit in 1960 there has been a continuous reduction in the size of circuits and thus the feature size of devices