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Название: Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice
Авторы: Giannuzzi L., North Carolina State University
Аннотация:
The focused ion beam (FIB) instrument has experienced an intensive
period of maturation since its inception. Numerous new techniques and
applications have been brought to fruition by the tireless efforts of some very
innovative scientists with the foresight to recognize the potential of this
upstart apparatus. Over the past few years, the FIB has gained acceptance as
more than just an expensive sample preparation tool, and has taken its place
among the suite of other instruments commonly available in analytical and
forensic laboratories, universities, geological, medical and biological
research institutions, manufacturing plants, and more. The applications for
FIB that have yet to be realized are endless. The future for this instrument is
certain to be filled with innovation and excitement.