Sophisticated miniaturised components and systems may indeed change all kinds
of products and equipment in the most dramatic way. Methodology and design of
miniaturisation represent a broad research topic with applications in fundamental
physics, chemistry, martial science, computing methods, ultra-precision
engineering, fabrication technology, micromachining, and many others based on
the principles, characterization, modeling, simulation, sophistication, flexibility of
state-of-the-art technology. Micromanufacturing and Nanotechnology (MaN), an
advanced product and equipment design concept has emerged and caters to the
need for miniaturisation. Technological research in the field of MaN is now
expanding; its design phases appear to be highly complex and involve multiphysics
and interdisciplinary approaches. The main objective of this book is to
provide information on concepts, principles, characteristics, applications, latest
technological developments and comparisons with regard to micro/nanosystems
and technology. It incorporates research, development, tutorials and case studies.
Academic and industrial research and developments in microengineering,
micromanufacturing, micromechanics and nanotechnology are being carried out at
many different institutions around the world. The technological trend in this
domain (e.g., design and development methodology, current application scenarios,
pros and cons, etc.) needs to be disseminated extensively so that the MaN
revolution can spread to serve society. In particular, the book is intended to focus
on describing the implicit concept of micromanufacturing and nanotechnology,
multi-physical principle of microelectromechanical systems (MEMS) and microopto-electro-mechanical
systems (MOEMS), design tips and hints, as much as the
techniques and methodology.