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Название: Frontiers of Thin Film Technology
Автор: Francombe M.
Аннотация:
Volume 28 of the book series Thin Films, titled Frontiers of Thin Film
Technology, focusses primarily on recent developments in those technologies
that are critical to the successful growth, fabrication, and characterization of
newly emerging solid-state thin film device architectures. The device structures
considered include not only the dominant and rapidly evolving semiconductor
integrated circuit components, but also structures that depend for their function
upon novel photonic properties, as well as superconducting, magnetic, and
ferroelectric behavior.