This handbook is a broad review of semiconductor materials and process technology, with emphasis on very-large-scale integration (VLSI) and ultra-large-scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.