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Название: MEMS: fundamental technology and applications
Автор: Choudhary V.
The microelectromechanical systems (MEMS) industry has seen explosive growth over the last
decade. This industry has seen proliferation in various technologies and applications alike. There
is not a single book that can present a unique view of this landscape and this book is no different.
However, this book serves the purpose of being eclectic in its selections from authorities in their
respective fields. This book has 19 chapters, roughly divided into two broad categories. Chapters
1–9 in the technology section discuss new MEMS devices, whereas Chapters 10–19 in the applications
section dwell upon novel MEMS-based applications. Each chapter is complete in itself and
can be read in isolation or in conjunction with other chapters of the book. Below we give a brief
overview of the chapters to guide readers for a quick selection of the topic of their choice