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Название: Handbook of Semiconductor Technology, Volumes 1
Авторы: Jackson K., Schroter W.
Semiconductor technology is the basis of today's microelectronics industry with its many impacts on our modern life, i.e. computer and communication technology. This two-volume handbook covers the basics of semiconductor processing technology, which are as essential for the design of new microelectronic devices as the fundamental physics. Volume 1 covers the structure and properties of semiconductors, with particular emphasis on concepts relevant to semiconductor technology. Volume 2 deals with the enabling materials technology for the electronics industry. World-renowned authors have contributed to this unique treatment of the processing of semiconductors and related technologies.