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Evgeni Gusev, Eric Garfunkel, Arthur Dideikin — Advanced Materials and Technologies for Micro Nano-Devices, Sensors and Actuators (NATO Science for Peace and Security Series B: Physics and Biophysics)
Evgeni Gusev, Eric Garfunkel, Arthur Dideikin — Advanced Materials and Technologies for Micro Nano-Devices, Sensors and Actuators (NATO Science for Peace and Security Series B: Physics and Biophysics)

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Название: Advanced Materials and Technologies for Micro Nano-Devices, Sensors and Actuators (NATO Science for Peace and Security Series B: Physics and Biophysics)

Авторы: Evgeni Gusev, Eric Garfunkel, Arthur Dideikin

Аннотация:

The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who have contributed to the book represent a diverse group of leading scientists from academic, industrial and governmental labs worldwide who bring a broad array of backgrounds such as device physics, technologists, electrical and mechanical engineering, surface chemistry and materials science). The contributions to this book are accessible to both expert scientists and engineers who need to keep up with leading edge research, and newcomers to the field who wish to learn more about the exciting basic and applied research issues relevant to micromechanical devices and technologies.


Язык: en

Статус предметного указателя: Неизвестно

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Издание: 1st Edition.

Год издания: 2010

Количество страниц: 310

Добавлена в каталог: 05.10.2014

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