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Название: Microelectronics, Microsystems and Nanotechnology
Авторы: Xanthi Zianni, Androula G. Nassiopoulou
This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. Contemporary news and future challenges in these fields are presented in invited papers.